Electronics-Silicon Devices and Materials(Date:1998/08/20)

Presentation
表紙

,  

[Date]1998/8/20
[Paper #]
目次

,  

[Date]1998/8/20
[Paper #]
Excellent Silicon Dioxide Formation by High-Density Plasma

Ryu Kaihara,  Masaki Hirayama,  Tadahiro Ohmi,  

[Date]1998/8/20
[Paper #]SDM98-114
Direct Nitridation of Silicon Surface at Ultra-Low-Temperature by High-Density Plasma

Katsuyuki Sekine,  Yuji Saito,  Masaki Hirayama,  Tadahiro Ohmi,  

[Date]1998/8/20
[Paper #]SDM98-115
Molecular Dynamics Study of Inert Gas Irradiation Process on SiO_2 Surface

Ryuji Miura,  Takayuki Onozu,  S. Salai Cheettu Ammal,  Momoji Kubo,  Kazuo Teraishi,  Akira Miyamoto,  Yuji Saito,  Ryu Kaihara,  Katsuyuki Sekine,  Masaki Hirayama,  Tadahiro Ohmi,  

[Date]1998/8/20
[Paper #]SDM98-116
Computational Study on the Potential Curve of Si Surface Oxidation

Kazuo Teraishi,  Aruba Yamada,  Akira Endou,  Isao Gunji,  S.S.C. Ammal,  Momoji Kubo,  Akira Miyamoto,  Masahiro Kitajima,  

[Date]1998/8/20
[Paper #]SDM98-117
Tight-binding Molecular Dynamics Simulation on the Desorption Process of SiO Molecule during the Oxidation of Si Surface

Aruba Yamada,  Akira Endou,  Hiromitsu Takaba,  Kazuo Teraishi,  Momoji Kubo,  S.Salai C. Ammal,  Akira Miyamoto,  Masahiro Kitajima,  

[Date]1998/8/20
[Paper #]SDM98-118
Interaction between NF_3 and Si substrate : A Density Functional Study

Akira Endou,  Aruba Yamada,  S.Salai C. Ammal,  Momoji Kubo,  Kazuo Teraishi,  Akira Miyamoto,  Masahiro Kitajima,  Thomas W. Little,  Fumio S. Ohuchi,  

[Date]1998/8/20
[Paper #]SDM98-119
Infrared reflection spectroscopy investigation of adsorption of SiH_x(CH_3)_<4-x> on Si surface

Msanori Shinohara,  Daisei Shoji,  Takehiro Maehama,  Yosuke Akama,  Michio Niwano,  

[Date]1998/8/20
[Paper #]SDM98-120
Atomic-Layer Thermal Nitridation Process of Si (100) Using NH_3

Takeshi WATANABE,  Masao SAKURABA,  Takashi MATSUURA,  Junichi MUROTA,  

[Date]1998/8/20
[Paper #]SDM98-121
Initial Reaction in Low-Temperature Selective Growth of W Using WF_6 and SiH_4 Gases

Yuji Yamamoto,  Takashi Matsuura,  Junichi Murota,  

[Date]1998/8/20
[Paper #]SDM98-122
[OTHERS]

,  

[Date]1998/8/20
[Paper #]