Electronics-Silicon Devices and Materials(Date:1997/12/12)

Presentation
表紙

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[Date]1997/12/12
[Paper #]
目次

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[Date]1997/12/12
[Paper #]
Structure and Properties of Indium-Plated Porous Silicon

T. Nagao,  K. Nishiyama,  A. Hatta,  T. Ito,  

[Date]1997/12/12
[Paper #]SDM97-164
Boron Neutralization in Low Temperature Epitaxial Si Films

Katsuya Abe,  Tatsuro Watahiki,  Akira Yamada,  Makoto Konagai,  

[Date]1997/12/12
[Paper #]SDM97-165
Boron segregation driven by implantation damage

J.X. Xia,  T. Saito,  T. Aoki,  Y. Kamakura,  K. Taniguchi,  

[Date]1997/12/12
[Paper #]SDM97-166
Activation of Boron in (B_2H_6+H_2)^+ implanted Silicon using An Ion-Implantor without mass-filters

Katsuhiro Yokota,  Hidetoshi Nishimura,  Kouchirou Terada,  Sigeki Sakai,  Masayasu Tanjou,  Hiromiti Takano,  Kiyoto Hirai,  Masao Kumagaya,  

[Date]1997/12/12
[Paper #]SDM97-167
Depth dependence of transient enhanced diffusion and cluster formation of boron

T. Saito,  J.X. Xia,  T. Aoki,  Y. Kamakura,  K. Taniguchi,  

[Date]1997/12/12
[Paper #]SDM97-168
In-Situ Characterization of Plasma-damaged Si by Photoreflectance Spectroscopy

Hideo WADA,  Koji ERIGUCHI,  Akira FUJIMOTO,  Takeshi KANASHIMA,  Masanori OKUYAMA,  

[Date]1997/12/12
[Paper #]SDM97-169
Study of Direct Tunneling of Very Thin Dielectric Film in Low Applied Voltage

N. MATSUO,  T. MIURA,  Y. URAKAMI,  T. MIYOSHI,  

[Date]1997/12/12
[Paper #]SDM97-170
Low Temperature Processing of High Quality SiO_2 films Using Oxygen Radicals

T. Futatsuyama,  K. Moriizumi,  T. Fuyuki,  H. Matsunami,  

[Date]1997/12/12
[Paper #]SDM97-171
Plasma CVD of Low-Dielectric Constant Insulator Films Using Fluorocarbon Gas with Si(NCO)_4

Yuko NAKAGAMI,  Tatsuru SHIRAFUJI,  Yasuaki HAYASHI,  Shigehiro NISHINO,  

[Date]1997/12/12
[Paper #]SDM97-172
Organic/Inorganic Hybrid CVD for Intermetal Dielectrics

Nobuo Aoi,  Shuichi Myumi,  Gaku Sugahara,  Kouji Arai,  Kazuyuki Sawada,  

[Date]1997/12/12
[Paper #]SDM97-173
Preparation of Bismuth Titanate Thin Films Grown on Silicon Wafers and its Properties

Masaki YAMAGUCHI,  Takao NAGATOMO,  

[Date]1997/12/12
[Paper #]SDM97-174
Magnetorodistance Effect of Gold Diffused and Non Diffused Four Terminal MAGFET

Nobuyuki MIZUKAWA,  Mio OZAWA,  Naoya JAMI,  Kiyomitsu KAWAI,  Tadashi OHACHI,  Ichiro TANIGUCHI,  

[Date]1997/12/12
[Paper #]SDM97-175
Evaluation of Wafer Material Dependence on LOCOS Edge Defects

Nobuyuki Kawakami,  Yasuyuki Aoki,  Toshihiro Kugimiya,  Kentaro Shibahara,  Shin Yokoyama,  

[Date]1997/12/12
[Paper #]SDM97-176
Improved Isolation Performance by High Temperature Oxidation with Recessed LOCOS

Yasuhiro Takeda,  Kazunari Honma,  Shuji Fujiwara,  Toru Dan,  Yosifumi Matsusita,  Keiichi Yodoshi,  

[Date]1997/12/12
[Paper #]SDM97-177
[OTHERS]

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[Date]1997/12/12
[Paper #]