Electronics-Silicon Devices and Materials(Date:1997/07/24)

Presentation
表紙

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[Date]1997/7/24
[Paper #]
CONTENTS

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[Date]1997/7/24
[Paper #]
The Study on the Reaction Mechanism of HDP-SiOF Film and Inter-Metal-Dielectric Application

Hong-Jae Shin,  Sung-Jin Kim,  Ji-Hyun Choi,  Byung-Kun Hwang,  Ho-Kyu Kang,  Moon-Yong Lee,  

[Date]1997/7/24
[Paper #]SDM97-43
Effects of grain size and crystalline orientation on the TiSi_2 C49-C54 transformation : Mechanism of pre-amorphization implantation effects in the TiSi_2 C49-C54 transformation

Tomoji Nakamura,  Hirofumi Tomita,  Kazuto Ikeda,  

[Date]1997/7/24
[Paper #]SDM97-44
Analysis of Dopant Interdiffusion and Parasitics Reduction on a-Si/Ti Local Wiring Scheme

Jiro Ida,  Atsushi Ohtomo,  Kouichi Morikawa,  Hiroshi Onoda,  

[Date]1997/7/24
[Paper #]SDM97-45
Simulated Performance of ArF Excimer Laser Lithography Optics

Hai Biri Chung,  Kag Hyeon Lee,  Doh Hoon Kim,  Sang-Soo Choi,  Jong Soo Kim,  Hyung Joun Yoo,  

[Date]1997/7/24
[Paper #]SDM97-46
Environmentally stable chemically amplified positive resist containing vinyllactam terpolymers

Min-Ho Jung,  Cheol-Kyu Bok,  Ki-Ho Baik,  

[Date]1997/7/24
[Paper #]SDM97-47
Study On Characteristics of Ge Based ARL for DUV Lithography

Yongbeom Kim,  Dongwan Kim,  Hoyoung Kang,  Jootae Moon,  Moonyong Lee,  

[Date]1997/7/24
[Paper #]SDM97-48
Characteristics of MOCVD-Cu Films Using Direct Liquid Injection and the Effects of Post-annealing

Chi-Hoon Jun,  Youn Tae Kim,  Jong Tae Baek,  Hyung Joun Yoo,  

[Date]1997/7/24
[Paper #]SDM97-49
Cleaning Method using H_2O_2 Buffing after Selective Silicon CMP

G.J. Bae,  K.H. Lee,  K.W. Lee,  G. Cha,  S.I. Lee,  M.Y. Lee,  

[Date]1997/7/24
[Paper #]SDM97-50
Effects of Low Resistivity TiN as a Wetting Layer on Submicron Via Contact Filling Process

Young Jung Kim,  Heon Do Kim,  Sang Ho Yu,  Jong Choul Kim,  Sang Kyoo Lee,  

[Date]1997/7/24
[Paper #]SDM97-51
Characterizations of Ferroelectric Transistors with BaMgF_4 Dielectric

Jong-Son Lyu,  Jin-Woo Jung,  Kwang-Ho Kim,  Bo-Woo Kim,  Hying Joun Yoo,  

[Date]1997/7/24
[Paper #]SDM97-52
Semi-empirical Device and Circuit Models for Ferroelectrics

Kyu-Nam Lim,  Kyuhyon Kim,  Songcheol Hong,  Kywro Lee,  

[Date]1997/7/24
[Paper #]SDM97-53
Nitrogen and Phosphorus co-doped Amorphous Silicon as a Floating Gate of Flash Memory

Tatsunori Kaneoka,  Masatoshi Anma,  Hiromi Itoh,  Yoshikazu Ohno,  Makoto Hirayama,  

[Date]1997/7/24
[Paper #]SDM97-54
Statistical Origin of DRAM Data-Retention-Time Distribution

A. Hiraiwa,  M. Ogasawara,  N. Natsuaki,  Y. Itoh,  H. Iwai,  

[Date]1997/7/24
[Paper #]SDM97-55
Implementation of 155.52Mbps Physical Layer Processor for ATM Applications

Sung-Do Kim,  Hee-Bum Jung,  Kui-Dong Kim,  Sang-Hoon Chai,  Won-Chul Song,  Kyung-Soo Kim,  

[Date]1997/7/24
[Paper #]SDM97-56
Fabrication of oscillation circuits and MOSFET matrix arrays on SOI structures for neural network applications

S. M. Yoon,  Y. Nagata,  J. H. Oh,  E. Tokumitsu,  H. Ishiwara,  

[Date]1997/7/24
[Paper #]SDM97-57
Implementation of Modem ASIC for CDMA/FM dual-mode Cellular Mobile Phone

Gyong-Lyong Park,  Kwang-Il Yeon,  Kyung-Soo Kim,  

[Date]1997/7/24
[Paper #]SDM97-58
A Multi-Page Cell Architecture for High-Speed Programming Multi-Level NAND Flash Memories

Ken Takeuchi,  Tomoharu Tanaka,  Toru Tanzawa,  

[Date]1997/7/24
[Paper #]SDM97-59
All-Digital Multi-Phase DLL with ±60 ps Skew Resolution for High-Speed DRAMs

Shigetoshi Wakayama,  Kohtaroh Gotoh,  Miyoshi Saito,  Junji Ogawa,  Hirotaka Tamura,  Yoshinori Okajima,  Masao Taguchi,  

[Date]1997/7/24
[Paper #]
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