Electronics-Silicon Devices and Materials(Date:1996/11/14)

Presentation
表紙

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[Date]1996/11/14
[Paper #]
目次

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[Date]1996/11/14
[Paper #]
[INVITED] Statistical Metrology in VLSI Development and Production

Hiroo Masuda,  

[Date]1996/11/14
[Paper #]SDM96-119
Data Optimization in Semiconductor Manufacturing

David A. Acree,  Kenji Matsubara,  

[Date]1996/11/14
[Paper #]SDM96-120
Development of RSF for a Statistical Design of Lithography Process

Akihiko Goda,  Akio Misaka,  Hiroyuki Umimoto,  Shinji Odanaka,  

[Date]1996/11/14
[Paper #]SDM96-121
A Determination Technique of Worst Case MOSFET Model Parameter Using Multivariate Analysis

Takeshi Yasuda,  Hirosi Kawashima,  Satosi Hori,  Yuko Maruyama,  Motoaki Tanizawa,  Masao Yamawaki,  

[Date]1996/11/14
[Paper #]SDM96-122
The Problems for TCAD Calibration and the Application of Statistical Method

Hisako Sato,  Katsumi Tsuneno,  Kimiko Aoyama,  Hiroo Masuda,  

[Date]1996/11/14
[Paper #]SDM96-123
ULSI Manufacturing Technology toward the 21st Century

Tadahiro Ohmi,  

[Date]1996/11/14
[Paper #]SDM96-124
In-situ Monitoring for Inductive Coupled Plasma

Akira Kagoshima,  Hiromichi Enami,  

[Date]1996/11/14
[Paper #]SDM96-125
Investigation of Freeradical Generation by Electrolysis of Pure Water

Tatsuya Koito,  

[Date]1996/11/14
[Paper #]SDM96-126
Evaluation of Activated Chemical Species Generated in RCA Cleaning Solution

Kiyotaka Tozuka,  Masayuki Kato,  Masayuki Toda,  Tadahiro Ohmi,  

[Date]1996/11/14
[Paper #]SDM96-127
Effect of Sonication on Radical Activation in Wafer Cleaning Solutions

Masayuki Kato,  Takenori Ochiai,  Masayuki Toda,  Tadahiro Ohmi,  

[Date]1996/11/14
[Paper #]SDM96-128
Zeta Potential on Si Surface in DHF Solution

H. Aoki,  N. Aoto,  

[Date]1996/11/14
[Paper #]SDM96-129
The impact of organic contamination on dielectric of thin gate oxide

Satoshi Ikeda,  Hidetsugu Uchida,  Hideto Ikari,  Yukihiro Tominaga,  Norio Hirashita,  

[Date]1996/11/14
[Paper #]SDM96-130
Two-dimensional Carrier Profiling in Diffusion Region by Etching/AFM Method

A. Kameyama,  N. Kodama,  H. Kikuchi,  

[Date]1996/11/14
[Paper #]SDM96-131
[OTHERS]

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[Date]1996/11/14
[Paper #]