Electronics-Silicon Devices and Materials(Date:1996/07/20)

Presentation
表紙

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[Date]1996/7/20
[Paper #]
目次

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[Date]1996/7/20
[Paper #]
Planarization Techniques of Selective CVD Aluminum Via Plugs for Quarter Micron ULSI MultilIevel Interconnections

Takao Amazawa,  Eiichi Yamamoto,  Yoshinobu Arita,  

[Date]1996/7/20
[Paper #]SDM96-64,ICD96-84
A Giga-Bit DRAM Contact Technology Using Anisotropical Selective Epitaxial Silicon : Formation of a self-aligned contact pad

Hiromitsu Hada,  Tohru Tatsumi,  Keiko Miyanaga,  Shoichi Iwao,  Hidemitsu Mori,  Kuniaki Koyama,  

[Date]1996/7/20
[Paper #]SDM96-65,ICD96-85
Advanced 0.1μm CMOS for RF Application

Digh Hisamoto,  Satoshi Tanaka,  Takuma Tanimoto,  Shin'ichiro Kimura,  

[Date]1996/7/20
[Paper #]SDM96-66,ICD96-86
[OTHERS]

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[Date]1996/7/20
[Paper #]