Electronics-Silicon Devices and Materials(Date:1996/05/23)

Presentation
表紙

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[Date]1996/5/23
[Paper #]
目次

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[Date]1996/5/23
[Paper #]
Tunnel Oxide Reliability Improvement by Si/SiO_2 Interface Strain Relaxation with Rapid Thermal, High Temperature Steam Oxidation

Hiroshi TOMITA,  Yoshio OZAWA,  Mamoru TAKAHASHI,  

[Date]1996/5/23
[Paper #]SDM96-16
Trap Generation due to Local Distortion and Impurities in Amorphous Silicon Dioxide Film

Chioko Kaneta,  

[Date]1996/5/23
[Paper #]SDM96-17
Simulation for Degradation of Flash Memory due to Charge Traps in the Tunnel Oxide

Ayumi Yokozawa,  Hiroki Shirai,  Takeshi Okazawa,  

[Date]1996/5/23
[Paper #]SDM96-18
Evaluation of Lateral Distribution of Interface Traps by Capacitance and Charge Pumping Methods in MOSFETs

Hidetsugu Uchida,  Koichi Fukuda,  Hiroyuki Tanaka,  Norio Hirashita,  

[Date]1996/5/23
[Paper #]SDM96-19
Origin of Dielectric Breakdown and Stress-induced Leakage Current in Ultra-thin Silicondioxide

Hideki Satake,  Naoki Yasuda,  Shin-ichi Takagi,  Akira Toriumi,  

[Date]1996/5/23
[Paper #]SDM96-20
Relationship between charge-to-breakdown and time-to-breakdown of the gate oxide damaged by plasma processing

Koji Eriguchi,  Takayuki Yamada,  Yukiko Kosaka,  Kenzo Hatada,  

[Date]1996/5/23
[Paper #]SDM96-21
Redistribution of in-situ doped or ion-implanted nitrogen in polysilicon and nitrogen pile-up at poly-Si/SiO_2 interface

Satoshi Nakayama,  Tetushi Sakai,  

[Date]1996/5/23
[Paper #]SDM96-22
Suppression Method of Floating Body Effects and Reliability of Fully Depleted MOSFETs/SIMOX

Toshiaki Tsuchiya,  Terukazu Ohno,  Satoshi Tazawa,  Masaaki Tomizawa,  

[Date]1996/5/23
[Paper #]SDM96-23
A Novel Circuit Technology with TIS for Gigabit DRAM's

Shigeyoshi Watanabe,  Katsuhiko Hieda,  Kazumasa Sunouchi,  Fumio Horiguchi,  Kazunori Ohuchi,  Hisashi Hara,  Fujio Masuoka,  

[Date]1996/5/23
[Paper #]SDM96-24
A 0.54μm^2 Self-Aligned, HSG Floating Gate Cell(SAHF Cell) for 256Mbit Flash Memories

H. Shirai,  T. Kubota,  I. Honma,  H. Watanabe,  H. Ono,  T. Okazawa,  

[Date]1996/5/23
[Paper #]SDM96-25
[OTHERS]

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[Date]1996/5/23
[Paper #]