Electronics-Silicon Devices and Materials(Date:1993/10/29)

Presentation
表紙

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[Date]1993/10/29
[Paper #]
目次

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[Date]1993/10/29
[Paper #]
Preparation and characterization of copper film deposited by hydrogen remote plasma after glow

Tooru Aoki,  Wickramanayaka Sunil,  Aleksander Wrobel,  Yoichiro Nakanishi,  Yoshinori Hatanaka,  

[Date]1993/10/29
[Paper #]SDM93-118
Remote plasma SiC deposition from organosilicons

Wickramanayaka Sunil,  Alecksander Wrobel,  Yoichiro Nakanishi,  Takatou Nakamura,  Yoshinori Hatanaka,  

[Date]1993/10/29
[Paper #]SDM93-119
Epitaxial growth and properties of nitride compound semiconductors by microwave excited MOVPE

Toshimi Yamamura,  Osamu Kato,  Hideki Endo,  Hirofumi Yamano,  Nobuo Itoh,  Akira Yoshida,  

[Date]1993/10/29
[Paper #]SDM93-120
Measurememt of Physical Properties of DLC Films Synthesized by Supermagnetron Plasma CVD Method

Masahiro Honda,  Haruhisa Kinoshita,  Shuji Nomura,  Toshiaki Tatsuta,  

[Date]1993/10/29
[Paper #]SDM93-121
Studies on the photo-induced structural change in a-Si:H films by molecular orbital theory

Akira Yoshida,  Kazuhito Suguri,  Koichi Nakanose,  Hiroshi Ogawa,  

[Date]1993/10/29
[Paper #]SDM93-122
Development of new type RF dowm flow asher with low damage and high ashing rate.

Takayuki Matsui,  Motoki Kobayashi,  Jun Kanamori,  

[Date]1993/10/29
[Paper #]SDM93-123
Formation of interlayer dielectric films by NH_3 added H_2O/TEOS plasma CVD

Jun'ichi Sato,  Masakazu Muroyama,  Atsushi Kawashima,  Hideyuki Kito,  

[Date]1993/10/29
[Paper #]SDM93-124
Selective extraction of ionic radicals and surface processes

Yoshihito Mitsuoka,  Hideo Sugai,  Katsutaro Ichihara,  Nobuaki Yasuda,  

[Date]1993/10/29
[Paper #]SDM93-125
Time resolution measurement of positive and negative oxygen ions in a helicon wave oxygen plasma

Tetsu Mieno,  Toshihiro Kamo,  Tatsuo Shoji,  Kiyoshi Kadota,  

[Date]1993/10/29
[Paper #]SDM93-126
Measurement of oxygen radical density in RF plasma by Laser- Induced Fluorescence

Akio Ui,  Isao Matsui,  Yoshiaki Nakamura,  Toshimitsu Omine,  

[Date]1993/10/29
[Paper #]SDM93-127
Excited atomic oxygen population in oxygen plasma downstream.

Wickramanayaka Sunil,  Yoshinori Hatanaka,  

[Date]1993/10/29
[Paper #]SDM93-128
[OTHERS]

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[Date]1993/10/29
[Paper #]