Electronics-Electromechanical Devices(Date:1996/04/19)

Presentation
表紙

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[Date]1996/4/19
[Paper #]
目次

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[Date]1996/4/19
[Paper #]
A study of the range of arc current with multiply-charged ions through one vacuum arc cathode root

Kenichi SATO,  Takayoshi KUBONO,  

[Date]1996/4/19
[Paper #]EMD-96-1
Development of PZT thin film for buckling micro actuators

S. Wakabayashi,  M. Sakata,  H. Totani,  H. Goto,  M. Takeuchi,  T. Yada,  

[Date]1996/4/19
[Paper #]EMD-96-2
Light-Driven Micro Mechanical Sensors and Actuators

Seiki Inaba,  Aki Shimamura,  Hironori Kumazaki,  Kazuhiro Hane,  

[Date]1996/4/19
[Paper #]EMD-96-3
Application of Micromachine Technologies for Optical Devices

Shinji NAGAOKA,  Yuji UENISHI,  

[Date]1996/4/19
[Paper #]EMD-96-4
Trend of Micromachine Technology R&D

Tokio Kitahara,  

[Date]1996/4/19
[Paper #]EMD-96-5
[OTHERS]

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[Date]1996/4/19
[Paper #]