Electronics-Electron Devices(Date:2000/03/08)

Presentation
表紙

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[Date]2000/3/8
[Paper #]
目次

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[Date]2000/3/8
[Paper #]
Study of initial growth stage by"In-situ"monitoring growth of dielectric oxide : "In-situ"monitoring growth of TiO_ thin films using laser Raman spectroscopy

K. Morisawa,  K. Nishida,  S. Muraishi,  A. Hiraki,  T. Katoda,  

[Date]2000/3/8
[Paper #]ED99-319, SDM99-212
Consideration of Insulator Films for MFIS Structure Using Pb(Zr, Ti)O_3 Thin Films : Measurement of Interface Trap Density by C-V and DLTS Method

Hironori Fujisawa,  Masaru Shimizu,  Hirohiko Niu,  

[Date]2000/3/8
[Paper #]ED99-320, SDM99-213
Electrical Properties of a PZT Film Deposited on an Epitaxial ZrN/Si Substrate

Sadayoshi Horii,  Seiji Yokoyama,  Susumu Horita,  

[Date]2000/3/8
[Paper #]ED99-321, SDM99-214
Consideration of Oxygen Source from Vapor Phase and Target by the Growth of Pb(Zr, Ti)O_3 Thin Film

Je-Deok Kim,  Shinya Kawagoe,  Kimihiro Sasaki,  Tomonobu Hata,  

[Date]2000/3/8
[Paper #]ED99-322, SDM99-215
Preparation and Fatigue Property of Ferroelectric Pb(Zr_x, Ti_<1-x)O_3 Capacitor by Sol-Gel Method

Kaoru Suzuki,  Yutaka Nagasawa,  Takeshi Kijima,  

[Date]2000/3/8
[Paper #]ED99-323, SDM99-216
Oriented growth of PZT on IrO_2 electrode film

T. Saito,  I. Ishida,  K. Okuwada,  A. Sawabe,  

[Date]2000/3/8
[Paper #]ED99-324, SDM99-217
The Development and Application of PZT Thin Films for Memories

Takashi Nakamura,  

[Date]2000/3/8
[Paper #]ED99-325, SDM99-218
[OTHERS]

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[Date]2000/3/8
[Paper #]