Electronics-Electron Devices(Date:1999/02/15)

Presentation
表紙

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[Date]1999/2/15
[Paper #]
目次

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[Date]1999/2/15
[Paper #]
Fabrication of Ferroelectric Thin Films by Chemical Solution Deposition and Electron-Beam-Induced Micropatterning Process

Soichiro OKAMURA,  Tadashi SHIOSAKI,  

[Date]1999/2/15
[Paper #]ED98-239
A Study on SrBi_2Ta_2O_9 Thin Films Prepared by Sol-Gel Method using Steam-curing Process

Yoshihiro Sawada,  Hideya Kobari,  Yoshimi Sato,  Akira Hashimoto,  Ichiro Koiwa,  Hiroyo Kato,  Tetsuya Osaka,  

[Date]1999/2/15
[Paper #]ED98-240
Current Status of LSMCD SBT Thin Films

Shinichiro Hayashi,  Yasuhiro Shimada,  Eiji Fujii,  Tatsuo Otsuki,  

[Date]1999/2/15
[Paper #]ED98-241
Dependence of electric properties of the SBT capacitor on the bottom electrode materials

T. Eshita,  K. Nakamura,  H. Yamawaki,  S. Miyagaki,  Y. Arimoto,  

[Date]1999/2/15
[Paper #]ED98-242
Process Degradation of a Ferroelectric Capacitor

T. Tamura,  T. Takai,  K. Matsuura,  H. Ashida,  K. Kondo,  S. Otani,  

[Date]1999/2/15
[Paper #]ED98-243
Analysis of Decomposed Layer Appearing on the Surface of Barium Strontium Titanate

Yoshihisa Fujisaki,  Yasuhiro Shimamoto,  Kazuyoshi Torii,  Yuichi Matsui,  

[Date]1999/2/15
[Paper #]ED98-244
Simplifled Ferroelectric Thin-Film Capacitor/Plug Structure for High-Density Logic-LSIs : Issues and Solution on Formation Process of PZT Thin-Film Capacitors on W-plugs

Katsuhiro Aoki,  Tomoyuki Sakoda,  Satoshi Hashimoto,  Yukio Fukuda,  Osamu Handa,  Tomomasa Emoto,  

[Date]1999/2/15
[Paper #]ED98-245
[OTHERS]

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[Date]1999/2/15
[Paper #]