Electronics-Electron Devices(Date:1994/09/13)

Presentation
表紙

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[Date]1994/9/13
[Paper #]
目次

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[Date]1994/9/13
[Paper #]
Proposal for LSI Mask Pattern Refinement using the Geometrical Theory of Diffraction(GTD)

Yoshinobu Takeuchi,  Katsuhiro Harada,  Makoto Ando,  

[Date]1994/9/13
[Paper #]ED94-46,SDM94-83,VLD94-43
Thermal oxidation of silicon in wet ambient diluted by nitrogen

Shigeki Kuroda,  Masahiro Yamate,  Kenji Nishi,  

[Date]1994/9/13
[Paper #]ED94-47,SDM94-84,VLD94-44
Efficient and Stable Solution Method of Viscoelastic Oxidation Including Stress-dependent Viscosity

Tetsuya Uchida,  Norihiko Kotani,  Natsuro Tsubouchi,  

[Date]1994/9/13
[Paper #]ED94-48,SDM94-85,VLD94-45
Phosphorus Pileup at the SiO_2/Si Interface in SOI Structure and Simulation of n-well Concentration

Yoshiyuki Sato,  Kazuo Imai,  Eisuke Arai,  

[Date]1994/9/13
[Paper #]ED94-49,SDM94-86,VLD94-46
A Study on the Dislocation Loop Growth and Boron Redistribution During the Post Implantation Annealing

Kenichi Uwasawa,  Takashi Uchida,  Takeo Ikezawa,  Masami Hane,  Takeo Matsuki,  Haruo Kato,  Koichi Ishida,  

[Date]1994/9/13
[Paper #]ED94-50,SDM94-87,VLD94-47
A Very Fast Three-Dimensional Impurity Profile Simulation Im corporating an Accumulated Diffusion Length

Shiroo Kamohara,  Masahiro Sugaya,  Hitoshi Matsuo,  Shigeo Ihara,  

[Date]1994/9/13
[Paper #]ED94-51,SDM94-88,VLD94-48
3-Dimensional Integrated Process Simulator of Topography and Impurity

Masato Fujinaga,  Tatsuya Kunikiyo,  Tetsuya Uchida,  Kazuya Kamon,  Norihiko Kotani,  Natsuro Tsubouchi,  

[Date]1994/9/13
[Paper #]ED94-52,SDM94-89,VLD94-49
Sputter Equipmental Simulation with Monte Carlo Method

Hiroaki Yamada,  Toshiki Shinmura,  Toshiyuki Ohta,  

[Date]1994/9/13
[Paper #]ED94-53,SDM94-90,VLD94-50
A Triargular Mesh Generation Method Suitable for the Analysis of Complex MOS Device Structures

Ikuhiro Yokota,  Shigetaka Kumashiro,  

[Date]1994/9/13
[Paper #]ED94-54,SDM94-91,VLD94-51
[OTHERS]

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[Date]1994/9/13
[Paper #]