Electronics-Component Parts and Materials(Date:2003/07/25)

Presentation
表紙

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[Date]2003/7/25
[Paper #]
目次

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[Date]2003/7/25
[Paper #]
Formation of Ultrathin Films of C_<60> Low-Dimensional Nano-Structures

Hiroki Okuyama,  Akane Kinjo,  Nobuyuki Iwata,  Hiroshi Yamamoto,  

[Date]2003/7/25
[Paper #]CPM2003-61
Evaluation of Si(001)-c(4×4) structure formed using MMSi by STM

Masayuki HARASHIMA,  Kanji YASUI,  Tadashi AKAHANE,  

[Date]2003/7/25
[Paper #]CPM2003-62
Growth Temperature Dependence of Atomic Level Structures at the Heterointerfaces of InP/GaInAs/InP and GaAs/GaInP/GaAs

Masao TABUCHI,  Shin'ichi HISADOME,  Ryo OGA,  Atsushi KOIZUMI,  Yasufumi FUJIWARA,  Yoshikazu TAKEDA,  

[Date]2003/7/25
[Paper #]CPM2003-63
Optical and electrical characteristics of Ge nanocrystals in SiO_2 film

Kiyokatsu TAKEYA,  Shinya OMAKI,  Motokazu NISHINO,  Hisashi FUKUDA,  

[Date]2003/7/25
[Paper #]CPM2003-64
Spectro-ellipsometric study of thin films for ULSI process : Optical properties of transition metal nitride barrier layers

Jan MISTRIK,  Kamil POSTAVA,  Roman ANTOS,  Tomuo YAMAGUCHI,  Mayumi TAKEYAMA,  Atsushi NOYA,  

[Date]2003/7/25
[Paper #]CPM2003-65
Thermal stability of Cu/TiHfN/Si contact system using thin TiHfN barrier

Mayumi B. Takeyama,  Tsutomu Kosugi,  Zun'ichi Igarashi,  Atsushi Noya,  

[Date]2003/7/25
[Paper #]CPM2003-66
Failure mechanism of thin VN barrier between Cu interconnects and SiO_2 layer

Mayumi B. Takeyama,  Takaomi Itoi,  Osamu Yanada,  Kazumi Satoh,  Atsushi Noya,  

[Date]2003/7/25
[Paper #]CPM2003-67
Structural and electrical properties of Ta_2O_5 thin films formed by metalorganic decomposition

Hiroaki SAITO,  Masahiro MIZUKAMI,  Hisashi FUKUDA,  

[Date]2003/7/25
[Paper #]CPM2003-68
Electrical properties and structure of titanium oxide thin films formed by metalorganic decomposition.

Shigeo TANAKA,  Mikio WATANABE,  Hisashi FUKUDA,  

[Date]2003/7/25
[Paper #]CPM2003-69
Preparation of TiO_2 Films with High Photocatalytic Activities by Gas Flow Sputtering

Kiyoshi ISHII,  Kazunari KUROKAWA,  Sachio YOSIHARA,  

[Date]2003/7/25
[Paper #]CPM2003-70
Sputtering-deposition of transparent conductive thin films on plastic film substrate

Hiro-omi KATO,  Kentaro FUNATSU,  Yoichi HOSHI,  

[Date]2003/7/25
[Paper #]CPM2003-71
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[Date]2003/7/25
[Paper #]
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[Date]2003/7/25
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