Electronics-Component Parts and Materials(Date:1999/10/15)

Presentation
表紙

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[Date]1999/10/15
[Paper #]
目次

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[Date]1999/10/15
[Paper #]
Epitaxial Growth of AlN Films by ECR Plasma Enhanced MOCVD

Suguru HOSHINO,  Yuzuru NARITA,  Kanji YASUI,  Masashi Akahane,  

[Date]1999/10/15
[Paper #]CPM99-87
Comparison of VPE layers of ZnS:N, ZnS:N, Ag, ZnS:N, Ag, Cl and ZnS:N, Ag, In showing p-type conduction

O. Matsumoto,  S. Kishimoto,  H. Kinto,  T. Hasegawa,  T. Matsumoto-Aoki,  S. Iida,  

[Date]1999/10/15
[Paper #]CPM99-88
Ohmic Contact using Cu-Zr amorphous alloy to n-type InP

Mayumi B. TAKEYAMA,  Junichi ITAI,  Atsushi NOYA,  Tamotsu HASHIZUME,  Hideki HASEGAWA,  

[Date]1999/10/15
[Paper #]CPM99-89
Preparation and Evaluation of ZnO Thin Films Prepared by RF-Sputtering

Hironori Katagiri,  Hiroyuki Shinohara,  Tomomi Kurumadani,  Kotoe Saitoh,  Tsukasa Washio,  Shinsuke Miyajima,  

[Date]1999/10/15
[Paper #]CPM99-90
Properties of ITO thin films sputter-deposited by using various kinds of rare gases

Ryoma Ohki,  Yoichi Hoshi,  

[Date]1999/10/15
[Paper #]CPM99-91
Preparation of High Tc YBa2Cu3Ox Thin Films with a-axis Orientation

Masahito Ichikawa,  Hiroshi Yamamoto,  Hideo Ihara,  Norio Terada,  

[Date]1999/10/15
[Paper #]CPM99-92
Structure Evaluation of CuInS_2-CuIn_5S_8 System Thin Film

Toshiyuki SEGA,  Koichiro OISHI,  Nozomu TSUBOI,  Satoshi KOBAYASHI,  Futao KANEKO,  

[Date]1999/10/15
[Paper #]CPM99-93
Site-selective Zn doping for CuGaS_2 layers grown by Vapor Phase Epitaxy under alternate source feeding condition

Yuichiro Nakagaki,  Hiromichi Kumakura,  Ariyuki Kato,  Matsumoto Tamao Aoki,  Naotaka Uchitomi,  Seishi Iida,  

[Date]1999/10/15
[Paper #]CPM99-94
Preparation of the TiZrN diffusion barrier at a low temperature in the Cu/Si contact system

Mayumi B. TAKEYAMA,  Atsushi NOYA,  Junya KOIZUMI,  Tsukasa SAITOU,  

[Date]1999/10/15
[Paper #]CPM99-95
Barrier properties of W_2N and ZrN films in poly-metal gate electrodes

Atsushi NOYA,  Mayumi B. TAKEYAMA,  

[Date]1999/10/15
[Paper #]CPM99-96
Analysis for Adhesion Force of KrF Chemically Amplified Resist by using Atomic Force Microscope tip

Norio Moriike,  Akira Kawai,  

[Date]1999/10/15
[Paper #]CPM99-97
Analysis for Mechanism of Resist Pattern Distraction by Atomic Force Microscope tip

Yoshihisa Kaneko,  Norio Moriike,  Akira Kawai,  

[Date]1999/10/15
[Paper #]CPM99-98
Analysis of Interaction Force among Polystyrene-latex (PSL) Particles by Atomic Force Microscope (AFM) Tip

Hiroshi HORIGUCHI,  Yuji SAWANAGA,  Akira KAWAI,  

[Date]1999/10/15
[Paper #]CPM99-99
Study of light irradiation effect of a-C:H films by XPS

N. Harada,  H. Uchiki,  

[Date]1999/10/15
[Paper #]CPM99-100
Fpitaxial Growth of SiC Films on AlN by Low Pressure CVD Using Organosilicon Compound

Kunio ASADA,  Tomohiko MAEDA,  Kanji YASUI,  Tadashi( AKAHANE,  

[Date]1999/10/15
[Paper #]CPM99-101
[OTHERS]

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[Date]1999/10/15
[Paper #]