Electronics-Component Parts and Materials(Date:1997/10/31)

Presentation
Preparation and properties of crystalline carbon thin films

Y. KAWAI,  M. T. Oo,  M. NAKAO,  K. KAMIMURA,  H. MATSUSHIMA,  Y. ONUMA,  

[Date]1997/10/31
[Paper #]CPM97-134
High-Rate Cluster Deposition Technique

Kiyoshi Ishii,  Kasuga Amano,  Hiroki Hamakake,  

[Date]1997/10/31
[Paper #]CPM97-135
Mechanism of the composition changes with sputtering gas pressure in the deposition of barium ferrite films by sputtering

Akihiro Kanbe,  Eisuke Suzuki,  Yoichi Hoshi,  

[Date]1997/10/31
[Paper #]CPM97-136
Epitaxial Growth of SiGe by Ion Beam Sputtering : Simulation of Oblique Incident Sputtering Process

Kimihiro SASAKI,  Michio MIZUTANI,  Tomonobu HATA,  

[Date]1997/10/31
[Paper #]CPM97-137
[OTHERS]

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[Date]1997/10/31
[Paper #]
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