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All Technical Committee Conferences (Searched in: All Years)
| Committee | Date Time | Place | Paper Title / Authors | Abstract | Paper # | |
| EA, US (Joint) |
2023-12-22 13:00 |
Fukuoka | [Poster Presentation]
Fabrication of epitaxial piezoelectric layer/acoustic Bragg reflector structure by etching of epitaxial sacrificial layer Satoshi Tokai, Takahiko Yanagitani (Waseda Univ.)  US2023-60 |
Q factor and power durability are expected to be improve d by using s ingle crystalline piezoelectric thin films in BAW ... [more] | US2023-60 pp.24-29 |
|
| ED | 2023-12-07 14:50 |
Aichi | WINC AICHI | Fabrication of Hafnium Nitride Spindt-type Field Emitter Arrays by Triode High Power Pulsed Magnetron Sputtering Shun Kondo (Seikei University/AIST), Takeo Nakano, Md. Suruz Mian (Seikei University), Masayoshi Nagao, Hiromasa Murata (AIST) ED2023-41 |
We have been attempting to fabricate Spindt-type emitter using the triode high-power pulsed magnetron sputtering (t-HPPM... [more] | ED2023-41 pp.11-14 |
| US | 2023-11-27 13:45 |
Shizuoka | Shizuoka University | Improvement of in-plane orientation and piezoelectricity of c-axis parallel oriented ZnO films and their application to thickness shear-mode resonators
-- Investigation on limiting of particle irradiation to substrate during sputtering deposition -- Naoki Tomiyama, Shinji Takayanagi (Doshisha Univ.), Yanagitani Takahiko (Waseda Univ.) US2023-49 |
ZnO films with the crystalline c-axis parallel to the substrate can excite shear waves and are suitable for thickness-sh... [more] | US2023-49 pp.34-39 |
| SDM | 2023-10-13 17:00 |
Miyagi | Niche, Tohoku Univ. | A study on the integration process of ReRAM and OFET utilizing Nitrogen doped LaB6/LaBxNy stacked structure Jiaang Zhao, Shun-ichiro Ohmi (Tokyo Tech) SDM2023-61 |
LaBxNy insulator films are realized by utilizing Ar/N2 plasma reactive sputtering with nitrogen doped LaB6 as a target. ... [more] | SDM2023-61 pp.46-49 |
| MIKA (3rd) |
2023-10-10 15:35 |
Okinawa | Okinawa Jichikaikan (Primary: On-site, Secondary: Online) |
[Poster Presentation]
Epitaxial piezoelectric thin film multilayer structure for RF filters Satoshi Tokai, Yanagitani Takahiko (Waseda Univ.) |
Wireless communication devices such as smartphones are equipped with many frequency filters to transmit and receive only... [more] | |
| CPM | 2023-08-01 10:05 |
Hokkaido | (Primary: On-site, Secondary: Online) |
Evaluation of the Physical Properties of Reactive sputtered Ti or V-based MAX alloy thin film Kazuki Ueda, Kazunobu Wkamatsu, Takeyasu Saito, Naoki Okamoto (Osaka Metropolitan Univ.) CPM2023-20 |
Currently, Cu is the main wiring material in leading-edge semiconductor devices. However, since Cu easily diffuses into ... [more] | CPM2023-20 pp.33-35 |
| SDM, OME | 2023-04-22 10:05 |
Okinawa | Okinawaken Seinen Kaikan (Primary: On-site, Secondary: Online) |
Crystallization by Rapid Thermal Annealing of Sputtered InSb Films Deposited on Glass Using Ne Tatsuya Okada, C. J. Koswaththage (Univ. Ryukyus), Takashi Kajiwar, Taizoh Sadoh (Kyushu Univ), Takashi Noguchi (Univ. Ryukyus) SDM2023-8 OME2023-8 |
For realizing high crystallinity InSb films on low-cost insulating substrate, we investigate the crystallization using R... [more] | SDM2023-8 OME2023-8 pp.30-31 |
| SDM, OME | 2023-04-22 10:30 |
Okinawa | Okinawaken Seinen Kaikan (Primary: On-site, Secondary: Online) |
Crystallization of InSb Films on Glass by RTA Takashi Kajiwara (Kyushu Univ.), Tatsuya Okada, Charith Jayanada Koswaththage, Takashi Noguchi (Univ. of the Ryukyus), Taizoh Sadoh (Kyushu Univ.) SDM2023-9 OME2023-9 |
To achieve low-cost and high-mobility InSb thin films, we studied the crystallization of InSb films sputtered on a glass... [more] | SDM2023-9 OME2023-9 pp.32-33 |
| OME | 2023-01-27 14:10 |
Kochi | Kochi Shoko Kaikan (Primary: On-site, Secondary: Online) |
Improvement of Electrocatalytic Performance for Nickel Nanoparticles Modified Carbon Film Electrodes Niwa Osamu, Ohta Saki, Ohtani Kazuya, Koike Ayaka, Takahashi Shota (Saiko), Kamata Tomoyuki, Kato Dai (AIST), Shiba Shunsuke (Ehime Univ.) OME2022-76 |
Metal nanoparticles have been expected to apply for electrodes of fuel cells and enzyme free glucose sensors due to thei... [more] | OME2022-76 pp.9-13 |
| EA, US (Joint) |
2022-12-22 16:50 |
Hiroshima | Satellite Campus Hiroshima | [Poster Presentation]
Sputter epitaxial LiNbO3 film shear mode thin film resonators Shinya Kudo (Wseda Univ.), Takahiko Yanagitani (Waseda Univ.) US2022-66 |
LiNbO3 have been used for the SAW filters because of their high Q and k. However, LiNbO3 filter have not used in the BAW... [more] | US2022-66 pp.86-91 |
| ED | 2022-12-08 14:10 |
Aichi | 12/8 Nagoya University, 12/9 WINC AICHI | Measurement of work function of hafnium nitride thin films prepared by dc and rf magnetron sputtering Tomoaki Osumi (Kyoto Univ.), Masayoshi Nagao (AIST), Yasuhito Gotoh (Kyoto Univ.) ED2022-53 |
Hafnium nitride(HfN) thin films were prepared by dc and rf magnetron sputtering. The nitrogen compositions of HfN thin f... [more] | ED2022-53 pp.15-17 |
| SDM | 2022-10-19 17:20 |
Online | Online | A study on threshold voltage control of MFSFET utilizing ferroelectric nondoped HfO2 thin films Masakazu Tanuma, Joong-Won Shin, Shun-ichiro Ohmi (Tokyo Tech) SDM2022-63 |
Ferroelectric HfO2 thin films are able to be formed on Si substrate, which is difficult for conventional materials due t... [more] | SDM2022-63 pp.38-42 |
| CPM | 2022-08-04 16:15 |
Hokkaido | Hydrogen gas effects on the properties of boron carbide films prepared by magnetron sputtering Nishida Tatsuya, Taniguchi Ryu, Masayoshi Sato, Yasuyuki Kobayashi, Yoshiharu Enta, Yushi Suzuki (Hirosaki Univ.), Hirokazu Fukidome (Touhoku Univ.), Hideki Nakazawa (Hirosaki Univ.) CPM2022-15 |
We have deposited amorphous boron carbide (B4C) films and hydrogenated amorphous B4C (B4C:H) films by RF magnetron sputt... [more] | CPM2022-15 pp.14-17 |
|
| SDM, ED, CPM | 2022-05-27 14:40 |
Online | Online | Reactive Sputtering of Nitride Dielectric Film for Silicon Photonics Applications Takaaki Fukushima, Jose A. Piedra Lorenzana, Rui Tsuchiya, Takeshi Hizawa, Yasuhiko Ishikawa (Toyohashi Univ. Tech.) ED2022-10 CPM2022-4 SDM2022-17 |
SiNx possesses a thermo-optic coefficient smaller by approximately one order of magnitude than that of Si, being effecti... [more] | ED2022-10 CPM2022-4 SDM2022-17 pp.13-16 |
| CPM | 2021-10-27 10:30 |
Online | Online | Study on the low-temperature deposition method of SiNx film for Cu-TSV Masaru Sato, Mayumi B. Takeyama (Kitami Inst. of Tech.) CPM2021-21 |
For Cu through silicon via in the 3D-LSI, It is desired to realize a deposition method of an insulating film less than 2... [more] | CPM2021-21 pp.5-7 |
| SDM | 2021-10-21 13:00 |
Online | Online | A study on Ar/N2-plasma sputtering gas pressure dependence on the LaBxNy insulator formation for non-volatile memory applications Eun-Ki Hong, Shun-ichiro Ohmi (Tokyo Tech.) SDM2021-46 |
In this study, we investigated Ar/N2-plasma sputtering gas pressure dependence on the LaBxNy insulator formation. The fl... [more] | SDM2021-46 pp.8-11 |
| SDM | 2021-10-21 13:25 |
Online | Online | A study on the effect of inter layers on ferroelectric nondoped HfO2 formation Masakazu Tanuma, Joong-Won Shin, Shun-ichiro Ohmi (Tokyo Tech.) SDM2021-47 |
Ferroelectric HfO_2 thin films are able to be formed on Si substrate, which is difficult for conventional materials due ... [more] | SDM2021-47 pp.12-15 |
| MRIS, ITE-MMS | 2021-10-08 15:35 |
Online | Online | Voltage-induced coercivity change in Pt/Co/CoO/amorphous TiOx structure Tomohiro Nozaki, Shingo Tamaru, Makoto Konoto, Takayuki Nozaki, Hitoshi Kubota, Akio Fukushima, Shinji Yuasa (AIST) MRIS2021-9 |
Voltage controlled magnetic anisotropy (VCMA) effect has been attracted attention as a low power consumption spin manipu... [more] | MRIS2021-9 pp.13-16 |
| MRIS, ITE-MMS | 2021-06-11 10:00 |
Miyagi | RIEC, Tohoku U. (Primary: On-site, Secondary: Online) |
Magnetic properties of cobalt ferrite thin films deposited on NiO and Cu2O seed layers Daiki Isurugi (Tohoku Univ.), Kenji Kamishima, Koichi Kakizaki (Saitama Univ.) MRIS2021-4 |
In order to make Cobalt ferrite(CFO) exhibit perpendicular magnetic anisotropy, CFO thin films were deposited on a few o... [more] | MRIS2021-4 pp.18-21 |
| CPM | 2021-03-03 10:45 |
Online | Online | Magnetic domain of highly-Bi-doped sputtered garnet films for a random number generator Izumi Nakamura, Shutaro Yoshida, Shinichiro Mito (NITTC) CPM2020-61 |
Physical random number generator is necessary to generate true random numbers. However, a physical random number generat... [more] | CPM2020-61 pp.22-25 |
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