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Abstract
Paper #
CPM
2005-11-11
14:45
Fukui
Changes of surface structures during reactions of monomethylgermane on Si(001) -- Toward to fabrication of Ge embedded in SiC structure --
Masayuki Harashima
,
Tetsushi Kanemaru
,
Ariyuki Kato
,
Tomoaki Ogiwara
,
Kanji Yasui
,
Tadashi Akahane
,
Masasuke Takata
(
Nagaoka Univ. of Technol.
)
Initial stage of surface reactions between monomethylgermane (MMGe:
GeH$_3$CH$_3$) and Si(001) surfaces has been analy...
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CPM2005-155
pp.19-24
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