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Committee Date Time Place Paper Title / Authors Abstract Paper #
ED 2017-08-09
15:25		 Tokyo Kikai-Shinko-Kaikan Bldg. Large area uniform processing characterization using synchrotron radiation deep X-ray lithography system (BL11)
Masaya Takeuchi, Akinobu Yamaguchi, Utsumi Yuichi (Univ. of Hyogo) ED2017-29		 We developed new deep X-ray lithography system (BL11) to fabricate high aspect ratio three-dimensional microstructure at... [more] ED2017-29
pp.17-18
AP, SAT, SANE
(Joint)		 2016-07-21
13:00		 Hokkaido Otaru port marina Trial Fabrication of 180GHz-Band E-Plane 2-Way divider and Horn Antennas by PTFE-Filled Waveguide and Its Evaluation
Mitsuyoshi Kishihara (Okayama Pref. Univ.), Akinobu Yamaguchi, Yuichi Utsumi, Isao Ohata (Univ. of Hyogo) AP2016-47		 The fabrication process of the waveguide using the SR (synchrotron radiation) direct etching process of PTFE and the spu... [more] AP2016-47
pp.61-66
EST, MWP, OPE, MW, EMT, IEE-EMT [detail] 2013-07-18
11:25		 Hokkaido Wakkanai Synthesis Cultural Center Trial Fabrication of 180 GHz-Band PTFE-Filled Waveguide by SR Etching and Its Evaluation
Mitsuyoshi Kishihara (Okayama Pref. Univ.), Hideki Kido, Akinobu Yamaguchi, Yuichi Utsumi, Isao Ohta (Univ. of Hyogo) MW2013-64 OPE2013-33 EST2013-28 MWP2013-23		 This paper describes trial fabrication of a PTFE-filled waveguide for 180 GHz-band operation with the use of the SR (syn... [more] MW2013-64 OPE2013-33 EST2013-28 MWP2013-23
pp.103-108
MW 2010-05-13
16:50		 Hyogo University of Hyogo Fabrication and Evaluation of PTFE-Filled Waveguide Bandpass Filter by SR Direct Etching
Mitsuyoshi Kishihara (Okayama Pref. Univ.), Hiroaki Ikeuchi, Katsuya Murai, Yuichi Utsumi, Tadashi Kawai, Isao Ohta (Univ. of Hyogo) MW2010-19		 It has been reported that a waveguide structure suitable for millimeter-wave and submillimeter-wave applications can be ... [more] MW2010-19
pp.29-33
OCS, OFT
(Joint)		 2006-08-24
13:25		 Miyagi   Fabrication of Blazed Gratings by SR Exposure System
Tomohiko Kanie, Makoto Katayama (SEI), Teppei Morita, Noboru Toshima, Junichi Kato (Nakanuma ASC), Tomio Nagayama, Yasushi Mizutani (KMIR), Fumiki Kato, Shinya Fujinawa, Susumu Sugiyama (Rits) OFT2006-17		 We have successively fabricated a blazed nano grating based on the X-ray gray-scale lithography technology.
The structu... [more]		 OFT2006-17
pp.7-9
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