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Committee Date Time Place Paper Title / Authors Abstract Paper #
OPE, R, CPM 2005-04-22
15:20
Tokyo Kikai-Shinko-Kaikan Bldg. Fatigue characteristics of the Si moveable comb inserted into MEMS optical devices
Takayuki Shimazu, Makoto Katayama (SEI), Yoshitada Isono (Rits)
This paper focuses on the fatigue characteristics of the single crystal silicon (SC-Si) cantilever in relation with the ... [more] R2005-6 CPM2005-6 OPE2005-6
pp.29-32
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