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 Conference Papers (Available on Advance Programs)  (Sort by: Date Descending)
 Results 1 - 6 of 6  /   
Committee Date Time Place Paper Title / Authors Abstract Paper #
US 2020-11-05
13:00
Aichi   Effect of negative ion bombardment increased in low-pressure sputtering deposition on crystallinity and piezoelectric property of ScAlN thin film
Takumi Tominaga, Shinji Takayanagi (Doshisha Univ.), Takahiko Yanagitani (Waseda Univ.) US2020-43
Since the ScAlN film has much higher piezoelectric response than the AlN film, it is expected to be applied to BAW devic... [more] US2020-43
pp.1-6
US 2020-09-28
14:25
Online Web Meeting c-Axis tilted ScAlN film piezoelectric transformer in the UHF range
Sarina Kinoshita (Waseda Univ./ZAIKEN), Takahiko Yanagitani (Waseda Univ./ZAIKEN/JST CREST) US2020-35
Battery-less sensors require energy harvesting from the ambient environment. RF-DC conversion with a rectifying antenna ... [more] US2020-35
pp.45-50
US 2020-09-28
14:50
Online Web Meeting Effect of negative ions generated from ScAl sputtering targets on kt2 and crystal orientation of ScAlN thin films
Rui Kihara (Waseda Univ.), Shinji Takayanagi (Doshisha Univ.), Takahiko Yanagitani (Waseda Univ.) US2020-36
ScAlN thin films with large electromechanical coupling coefficient have been attracting attention for the application to... [more] US2020-36
pp.51-56
US 2019-07-29
14:20
Hokkaido   Liquid viscoelasticity characterization by the complex reflection coefficient using quasi-shear mode c-axis tilted ScAlN thin film transducers
Ryosuke Amano, Yui Yamakawa (Waseda Univ./ZAIKEN), Takahiko Yanagitani (Waseda Univ./ZAIKEN/JST-PREST) US2019-31
In the complex reflection measurement of liquid/solid interface, the low angle incidence of shear horizontal (SH) wave t... [more] US2019-31
pp.19-23
US 2018-10-04
12:40
Miyagi   Evaluation of fluid viscosity in the ultrahigh frequency range using quasi-shear mode c-axis tilted ScAlN thin film resonators
Yui Yamakawa, Takumi Soutome, Rei Karasawa, Takahiko Yanagitani (Waseda Univ.) US2018-53
In the fluid viscosity evaluation based on the QCM (Quartz Crystal Microbalance), the quartz crystal plate is required t... [more] US2018-53
pp.25-29
US 2015-10-09
15:50
Ishikawa Kanazawa Institute of Technology Brillouin scattering measurement of coherent phonons induced by ScAlN piezoelectric thin film
Eunhye Cho, Masahiko Kawabe, Shinji Takayanagi (Doshisha Univ.), Masashi Suzuki, Takahiko Yanagitani (Waseda Univ.), Mami Matsukawa (Doshisha Univ.) US2015-63
Brillouin scattering spectroscopy allows to investigate a shift frequency of the incident light in GHz range, which occu... [more] US2015-63
pp.27-30
 Results 1 - 6 of 6  /   
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