Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
ICD |
2023-04-11 16:05 |
Kanagawa |
(Primary: On-site, Secondary: Online) |
[Keynote Address]
Game Change by Spintronics Low Power semiconductors and its contribution to a carbon-neutral society
-- from STT/SOT-MRAM to its application to IoT/AI processors -- Tetsuo Endoh (Tohoku Univ.) ICD2023-13 |
[more] |
ICD2023-13 p.30 |
SDM |
2017-02-06 10:05 |
Tokyo |
Tokyo Univ. |
[Invited Talk]
Impact of Dry Process Damage on Chemical Mechanical Planarization with Cu/low-k Structure Masako Kodera, Hiroyuki Yano, Naoto Miyashita (Toshiba) SDM2016-139 |
We evaluated the impact of process damage caused by dry or sputtering on chemical mechanical planarization (CMP) with Cu... [more] |
SDM2016-139 pp.1-4 |
ED |
2016-10-26 11:25 |
Mie |
|
Trials to Clarify the Mechanism of Low Field Emission from Carbon-related Materials
-- Through Field Emission from Vacuum Arc-Prepared Carbon Films and C60 -- Masahiro Sasaki, Yoichi Yamada, Toshiharu Higuchi, Ken Asanagi, Manabu Adachi, Yuji Nishiyama, Takuma Mojin (U. of Tsukuba) ED2016-55 |
From some sorts of carbon-related materials, we have sometimes observed a onset applied field much smaller than that exp... [more] |
ED2016-55 pp.57-62 |
ASN (2nd) |
2015-12-04 14:35 |
Overseas |
Singapore Management University, Singapore |
The Power Flow Coloring: Giving a Unique ID to a Power Flow from a Specific Power Source to a Specific Power Load Saher Javaid, Yuhei Kurose, Takekazu Kato, Takashi Matsuyama (Kyoto University) |
Nano-grid (NG) finds feasibility for integrating distributed energy resources to realize efficient and versatile energy ... [more] |
|
US |
2015-09-04 10:20 |
Hokkaido |
|
Generation of acoustic flow using a cylindrical pipe vibrating in axisymmetric flexural travelling wave and application to non-contact ultrasonic transportation Takehiro Takano, Hideki Tamura (Tohoku Inst. of Tech.), Manabu Aoyagi (Muroran Inst. of Tech.) US2015-55 |
It is well-known that acoustic flow is generated in air near ultrasonic travelling wave. We have proposed that damped fl... [more] |
US2015-55 pp.51-56 |
LQE, ED, CPM |
2014-11-28 13:15 |
Osaka |
|
Suppression in Current Collapse of Millimeter-Wave GaN-HEMT Using MSQ-Based Low-k Insulator Films Shiro Ozaki, Kozo Makiyama, Toshihiro Ohki, Yoichi Kamada, Masaru Sato, Yoshitaka Niida, Naoya Okamoto, Satoshi Masuda, Kazukiyo Joshin (Fujitsu) ED2014-90 CPM2014-147 LQE2014-118 |
We have investigated the effect of moisture on current collapse of GaN high electron mobility transistor (GaN-HEMT) when... [more] |
ED2014-90 CPM2014-147 LQE2014-118 pp.81-84 |
SDM |
2014-02-28 10:10 |
Tokyo |
Kikai-Shinko-Kaikan Bldg. |
[Invited Talk]
Trend of practical technology in advanced low-k integration Naoya Inoue (Renesas Electronics Corp.) SDM2013-166 |
Looking at the trend in Cu/Low-k interconnect technology, integration issues and solutions are discussed from the viewpo... [more] |
SDM2013-166 pp.7-12 |
SDM |
2014-02-28 14:40 |
Tokyo |
Kikai-Shinko-Kaikan Bldg. |
[Invited Talk]
Low temperature growth of dense carbon nanotube arrays on conductive underlayers Suguru Noda (Waseda Univ.), Nuri Na (Waseda Univ./Univ. of Tokyo), Takashi Shirai, Keisuke Nomura (Univ. of Tokyo), Kei Hasegawa (Waseda Univ.) SDM2013-171 |
Increasing density in semiconductor integrated circuits demands new wiring materials having higher current carrying capa... [more] |
SDM2013-171 pp.35-38 |
ED, SDM |
2014-02-27 14:15 |
Hokkaido |
Hokkaido Univ. Centennial Hall |
Fabrication and Characteristics of carbon nanotube TFT Tomo Tanaka, Eiichi Sano (Hokkaido Univ.) ED2013-133 SDM2013-148 |
Single-walled carbon nanotube (CNT) network thin-film transistors (TFTs) are attractive owing to their simple, low-cost ... [more] |
ED2013-133 SDM2013-148 pp.7-12 |
SDM, ED |
2013-02-28 11:45 |
Hokkaido |
Hokkaido Univ. |
Electrical Properties of Carbon Fibers Embedded with CNTs Takehito Watanuki, Tomo Tanaka, Eiichi Sano, Bunshi Fugetsu (Hokkaido Univ.) ED2012-143 SDM2012-172 |
We measured the temperature dependence of electrical conductivity and low-frequency noise characteristics for PAN-based ... [more] |
ED2012-143 SDM2012-172 pp.83-88 |
OME, IEE-DEI |
2013-01-24 16:50 |
Aichi |
|
Growth of graphene by low pressure chemical vapor deposition Takaya Maesaka, Hideki Sato, Hideto Miyake, Kazumasa Hiramatsu (Mie Univ.) OME2012-89 |
We have synthesized graphene film by a low-pressure chemical vapor deposition (LP-CVD) method using ethanol as a carbon ... [more] |
OME2012-89 pp.31-35 |
CPM |
2012-08-09 09:50 |
Yamagata |
|
Low temperature deposition of SiNx thin films by radical-assisted reaction Mayumi B. Takeyama, Masaru Sato (Kitami Inst. Technol.), Yoshihiro Nakata, Yasushi Kobayashi, Tomoji Nakamura (Fujitsu Lab. Ltd.), Atsushi Noya (Kitami Inst. Technol.) CPM2012-45 |
3-dimensional stacked LSI is of high interest to overcome the issues how to develop the integration density and/or funct... [more] |
CPM2012-45 pp.51-54 |
SDM |
2011-02-07 10:50 |
Tokyo |
Kikai-Shinko-Kaikan Bldg. |
Path-finding for Integration of Robust Low-k (k-2.5) SiOCH in System LSI Naoya Inoue, Makoto Ueki, Hironori Yamamoto, Ippei Kume, Jun Kawahara, Manabu Iguchi, Hirokazu Honda, Yoshitaka Horikoshi, Yoshihiro Hayashi (Renesas Electronics Corp.) SDM2010-217 |
Impacts of k-value reduction on LSI performances are clarified quantitatively using 2M-gate net-list. Reduction in k-val... [more] |
SDM2010-217 pp.7-12 |
WBS, ITS (Joint) |
2010-12-06 11:15 |
Ibaraki |
AIST |
[Invited Talk]
Personal mobility robot technologies in AIST for the utilization in compact city Osamu Matsumoto, Masashi Yokotsuka (AIST), Yusuke Suzuki (SIT), Naohisa Hashimoto, Shin Kato (AIST) WBS2010-38 ITS2010-22 |
In this paper, we introduce personal mobility robot technologies in AIST for the contribution to low-carbon traffic syst... [more] |
WBS2010-38 ITS2010-22 pp.19-22(WBS), pp.1-4(ITS) |
CS, CQ (Joint) |
2010-04-26 17:15 |
Aomori |
Oirase Keiryu Hotel |
[Special Talk]
Sociable City Planning Jun Izumi (Nagoya Sangyo Univ) CS2010-6 CQ2010-13 |
It is summarized that ideas on city planning as the linkage of sociable cities after the Industrial Revolution focusing ... [more] |
CS2010-6 CQ2010-13 pp.29-34(CS), pp.71-76(CQ) |
CPM, ED, SDM |
2008-05-16 11:15 |
Aichi |
Nagoya Institute of Technology |
Characterization of Low-Pressure MOCVD-grown AlxGa1-xN on Si substrates Kouichi Hiromori, Hiroyasu Ishikawa, Fumiyuki Tokura, Keita Shimanaka, Naoto Mori, Tomohiko Morimoto (Nagoya Inst. of Tech.) ED2008-14 CPM2008-22 SDM2008-34 |
AlxGa1-xN films were grown on Si substrates as a function of reactor pressure using a low-pressure MOCVD method. The Al... [more] |
ED2008-14 CPM2008-22 SDM2008-34 pp.67-70 |
SDM |
2007-10-05 10:55 |
Miyagi |
Tohoku Univ. |
The Evaluation of New Amorphous Hydrocarbon Film aCHx, for Low-k Copper Barrier Film Hiraku Ishikawa (Tokyo Electron/Tohoku Univ.), Toshihisa Nozawa, Takaaki Matsuoka (Tokyo Electron Technology Development Institute), Akinobu Teramoto, Masaki Hirayama, Takashi Ito, Tadahiro Ohmi (Tohoku Univ.) SDM2007-183 |
In recent ULSI, Cu wiring and low-k dielectrics are used to reduce RC delay in interconnect. In order to increase operat... [more] |
SDM2007-183 pp.31-34 |