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Committee Date Time Place Paper Title / Authors Abstract Paper #
ED 2021-02-22
13:25		 Online Online ED2020-39 A surface stress sensor fabricated by MEMS technology can detect biomacromolecules such as protein with label- free mann... [more] ED2020-39
pp.5-8
VLD, DC, IPSJ-SLDM, CPSY, RECONF, ICD, CPM
(Joint) [detail]		 2011-11-29
13:50		 Miyazaki NewWelCity Miyazaki [Invited Talk] Integrated CMOS-MEMS Technology and Its Applications
Hiroki Morimura, Toshishige Shimamura, Kei Kuwabara, Kazuyoshi Ono (NTT), Katsuyuki Machida (NTT-AT) CPM2011-158 ICD2011-90		 The paper describes integrated CMOS-MEMS technology and its applications. We discuss the features of integrated compleme... [more] CPM2011-158 ICD2011-90
pp.47-52
SDM 2009-11-12
15:30		 Tokyo Kikai-Shinko-Kaikan Bldg. Development of MEMS and Equivalent Circuit Generator
Nobuyo Fujiwara, Kazuo Asaumi (Mizuho Information & Research Institute), Tomoyuki Koike (Micromachine Center), Toshiyuki Tsuchiya (Kyoto Univ,), Gen Hashiguchi (Shizuoka Univ.) SDM2009-140		 In order to improve CMOS-integrated MEMS(micro electromechanical system) devices design efficiency, we developed a desig... [more] SDM2009-140
pp.29-32
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