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Committee Date Time Place Paper Title / Authors Abstract Paper #
SIP, ICD, IE, IPSJ-SLDM 2005-10-21
15:50
Miyagi Ichinobo, Sakunami-Spa A cell library development methodology for character projection
Makoto Sugihara (ISIT), Taiga Takata, Kenta Nakamura (Kyushu Univ.), Ryoichi Inanami (e-BEAM), Hiroaki Hayashi (Tokyo Electron), Katsumi Kishimoto (e-BEAM), Tetsuya Hasebe (Tokyo Electron), Yukihiro Kawano (e-BEAM), Yusuke Matsunaga, Kazuaki Murakami (Kyushu Univ.), Katsuya Okumura (Univ. of Tokyo)
We propose a cell library development methodology for throughput enhancement of electron beam direct-write (EBDW) system... [more] SIP2005-128 ICD2005-147 IE2005-92
pp.79-84
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