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Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM 2012-06-21
15:05
Aichi VBL, Nagoya Univ. Detection of impurities having various chemical bonding states and their depth profiles in ultra shallow junctions
Kazuo Tsutsui, Jun Kanehara, Youhei Miyata (Tokyo Tech.), Hiroshi Nohira (Tokyo City Univ.), Yudai Izumi, Takayuki Muro, Toyohiko Kinoshita (JASRI), Parhat Ahmet, Kuniyuki Kakushima, Takeo Hattori, Hiroshi Iwai (Tokyo Tech.) SDM2012-56
Depth profiles of impurity having different chemical bonding states were evaluated by using soft x-ray photoelectron spe... [more] SDM2012-56
pp.69-74
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