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All Technical Committee Conferences (Searched in: All Years)
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Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
SDM, ICD, ITE-IST [detail] |
2018-08-07 12:55 |
Hokkaido |
Hokkaido Univ., Graduate School of IST M Bldg., M151 |
[Invited Talk]
Development of SiGe-MEMS-on-CMOS technology for ultra-low-power inertial sensors Hideyuki Tomizawa, Yoshihiko Kurui (Toshiba), Ippei Akita (AIST), Akira Fujimoto, Tomohiro Saito, Akihiro Kojima, Hideki Shibata (Toshiba) SDM2018-29 ICD2018-16 |
In this paper, for the first time we demonstrate the material benefits of SiGe for MEMS applications based on the result... [more] |
SDM2018-29 ICD2018-16 pp.21-24 |
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