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Committee Date Time Place Paper Title / Authors Abstract Paper #
CPM 2006-11-10
11:15
Ishikawa Kanazawa Univ. The practical sputtering system for oxide films by oxygen ion implantation
Shinobu Chiba, Kimihiro Sasaki (Kanazawa Univ.), Akira Motoki (CBC Co.,Ltd), Tomonobu Hata (JST), Akihiko Ito (SHIBAURA MECHATRONICS Corp.)
 [more] CPM2006-127
pp.81-86
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