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Abstract
Paper #
CPM
2006-11-10
11:15
Ishikawa
Kanazawa Univ.
The practical sputtering system for oxide films by oxygen ion implantation
Shinobu Chiba
,
Kimihiro Sasaki
(
Kanazawa Univ.
),
Akira Motoki
(
CBC Co.,Ltd
),
Tomonobu Hata
(
JST
),
Akihiko Ito
(
SHIBAURA MECHATRONICS Corp.
)
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CPM2006-127
pp.81-86
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