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ICD 2007-04-12
10:40		 Oita   Device Technology for embedded DRAM utilizing stacked MIM(Metal-Insulator-Metal) Capacitor
Takaho Tanigawa, Yasushi Yamagata, Hiroki Shirai, Hirotoshi Sugimura, Tomoko Wake, Ken Inoue, Takashi Sakoh, Masato Sakao (NECEL) ICD2007-4		 This paper presents embedded DRAM device technology utilizing stacked MIM(Metal-Insulator-Metal) capacitor. Targeted for... [more] ICD2007-4
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