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Abstract
Paper #
ED
,
CPM
,
SDM
2006-05-19
09:25
Aichi
VBL, Toyohashi University of Technology
Heteroepitaxy of GaN for Si-GaN OEIC
Tatsuya Kawano
,
Susumu Hatakenaka
,
Mikinori Itoh
,
Akihiro Wakahara
,
Hiroshi Okada
,
Makoto Ishida
(
Toyohashi Univ. Tech.
)
A novel Si/GaN/g-Al2O3/Si structure by which both Si-LSI(Large scale integrated circuit) and GaN-based optical devices c...
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ED2006-30
CPM2006-17
SDM2006-30
pp.55-60
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