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 Conference Papers (Available on Advance Programs)  (Sort by: Date Descending)
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Committee Date Time Place Paper Title / Authors Abstract Paper #
CPM 2012-08-08
14:55		 Yamagata   Low temperature thin film deposition of Si by using Chloride Reduction Chemical Vapor Deposition
Akira Shibata, Takehito Watanabe, Kensaku Kanomata, Takahiko Suzuki, Fumihiko Hirose (Yamagata Univ.) CPM2012-37		 (To be available after the conference date) [more] CPM2012-37
pp.21-22
CPM 2010-10-28
17:30		 Nagano   Fluorine-free tungsten deposition by metal-chloride-reduction chemical vapor deposition
Takehito Watanabe, Akira Shibata, Kensaku Kanomata, Takahiko Suzuki, Fumihiko Hirose (Yamagata Univ.) CPM2010-98		 (To be available after the conference date) [more] CPM2010-98
pp.39-42
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