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Committee Date Time Place Paper Title / Authors Abstract Paper #
CPM 2008-10-30
14:55		 Niigata Niigata Univ. Characteristic of AZO Thin Films Deposited by SBD Method
Takuya Honma, Kaoru Satou, Takeharu Shimomura, Rijin Syou, Hidehiko Shimizu, Haruo Iwano (Niigata Univ.), Yoichi Hoshi (Tokyo Polytechnio Univ.) CPM2008-79		 In order to clarify a problem in sputtering deposition process when zinc oxide films of transparent conductive oxides we... [more] CPM2008-79
pp.23-28
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