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 Conference Papers (Available on Advance Programs)  (Sort by: Date Descending)
 Results 1 - 6 of 6  /   
Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM, EID 2014-12-12
16:00		 Kyoto Kyoto University Formation of nc-Si in SiOx by Soft X-ray Irradiation
Fumito Kusakabe, Shota Hirano, Akira Heya, Naoto Matsuo, Kazuhiro Kanda, Takayasu Mochizuki, Shuji Miyamoto (Univ. of Hyogo), Kazuyuki Kohama, Kazuhiro Ito (Osaka Univ.) EID2014-32 SDM2014-127		  [more] EID2014-32 SDM2014-127
pp.99-102
SDM 2013-12-13
13:30		 Nara NAIST Low-Temperature Crystallization of Thin-Film Semiconductor by Soft X-ray Irradiation -- Photon Energy Dependence and TEM Observation of SiGe Multilayer Film --
Fumito Kusakabe, Yuki Maruyama, Akira Heya, Naoto Matsuo, Kazuhiro Kanda, Takayasu Mochizuki (Univ. of Hyogo), Kazuhiro Ito, Makoto Takahashi (Osaka Univ.) SDM2013-126		 We examined dependence of the crystallization for a-Ge and a-SiGe on the photon energy. In the storage-ring current of 7... [more] SDM2013-126
pp.61-66
SDM, OME 2012-04-28
09:00		 Okinawa Okinawa-Ken-Seinen-Kaikan Bldg. [Invited Talk] Low-Temperature Crystallization of Amorphous Semiconductor Films Using Only Soft X-ray Irradiation
Naoto Matsuo, Akira Heya, Takayasu Mochizuki, Shuji Miyamoto, Kazuhiro Kanda (Univ Hyogo) SDM2012-11 OME2012-11		  [more] SDM2012-11 OME2012-11
pp.49-54
SDM 2011-12-16
16:00		 Nara NAIST Development of Low-Temperature Crystallization Method of Thin Film Semiconductor Using Soft X-ray Source
Akira Heya, Yuki Nonomura, Shota Kino, Naoto Matsuo (Univ. Hyogo), Sho Amano (LASTI Univ. Hyogo), Shuji Miyamoto, Kazuhiro Kanda, Takayasu Mochizuki (Univ. Hyogo), Kaoru Toko, Taizoh Sadoh, Masanobu Miyao (Kyushu Univ.) SDM2011-145		 It is necessary two processes (crystal-nucleus formation and crystal grain growth) for crystallization. In general, the ... [more] SDM2011-145
pp.71-76
SDM 2009-12-04
15:30		 Nara NAIST Crystallization of a-Si Film via Quasi-Nuclei Formed by Laser Plasma Soft X-Ray Irradiation
Sinya Isoda, Naoto Matsuo, Sho Amano, Akira Heya, Shuji Miyamoto, Takayasu Mochizuki (Univ. of Hyogo.) SDM2009-165		 A-Si film irradiated Laser Plasma soft X-ray (LPX) was analyzed by Raman spectrometry, spectroscopic ellipsometry, and e... [more] SDM2009-165
pp.73-77
SDM 2007-12-14
10:40		 Nara Nara Institute Science and Technology Influence of laser-plasma x-ray irradiation on crystallization of a-Si film by excimer laser annealing
Yasuyuki Takanashi, Naoto Matsuo, Kazuya Uejukkoku, Akira Heya (Dept.Mat.Sci.&Chem.,Univ.Hyogo), Sho Amano, Shuji Miyamoto, Takayasu Mochizuki (LASTI,Univ.Hyogo) SDM2007-224		 We investigated the crystallization by Laser Plasma Soft-X-ray (LPX) irradiation followed by Excimer Laser Annealing (EL... [more] SDM2007-224
pp.9-13
 Results 1 - 6 of 6  /   
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