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Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM 2017-10-26
09:30
Miyagi Niche, Tohoku Univ. [Invited Talk] Utilization of Big Data for Innovation in Semiconductor Memory Manufacturing -- Comprehensive Big-Data-Based Monitoring System for Yield Analysis in Semiconductor Manufacturing --
Hiroshi Akahori (Toshiba Memory), Kouta Nakata, Ryohei Orihara, Yoshiaki Mizuoka, Kentaro Takagi (Toshiba), Kenichi Kadota, Takaharu Nishimura, Yukako Tanaka, Hidetaka Eguchi (Toshiba Memory) SDM2017-55
In this work, we focus on yield analysis task where engineers identify the cause of failure from wafer failure map patte... [more] SDM2017-55
pp.31-33
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