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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
ED |
2009-06-11 13:50 |
Tokyo |
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Post CMP Cleaning by Megasonic Using Waveguide Tube Type Equipment Kazunari Suzuki (Kaijo Corp./Shibaura Inst. of Tech.), Ki Han, Shouichi Okano, Junichiro Soejima (Kaijo Corp.), Yoshikazu Koike (Shibaura Inst. of Tech.) ED2009-37 |
At single wafer processing, we proposed novel ultrasonic cleaning equipment using the waveguide tube made of quartz. At ... [more] |
ED2009-37 pp.7-10 |
US |
2009-04-24 15:45 |
Tokyo |
The University of Electro-Communications |
A Novel Ultrasonic Cleaning Equipment using Waveguide mode Kazunari Suzuki (Shibaura Inst. of Tech./Kaijo Corp.), Yoshikazu Koike (Shibaura Inst. of Tech.), Ki Han, Shouichi Okano, Junichiro Soejima (Kaijo Corp.) US2009-5 |
At single wafer processing, spin cleaner using spouting ultrasonic cleaning transducer has been developed. In
such a pr... [more] |
US2009-5 pp.23-28 |
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