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ICD 2005-07-14
Aichi Toyohashi Univ. of Tech. Interface Electronics for MEMS Vibratory Sensors
Kazusuke Maenaka, Nobuhiro Sawai, Takayuki Fujita, Yoichiro Takayama (Univ. of Hyogo)
A MEMS vibratory acceleration sensor,vibratory gyroscope and their interface circuitry are discussed. Vibratory type sen... [more] ICD2005-52
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