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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
OCS, OFT (Joint) |
2006-08-24 13:25 |
Miyagi |
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Fabrication of Blazed Gratings by SR Exposure System Tomohiko Kanie, Makoto Katayama (SEI), Teppei Morita, Noboru Toshima, Junichi Kato (Nakanuma ASC), Tomio Nagayama, Yasushi Mizutani (KMIR), Fumiki Kato, Shinya Fujinawa, Susumu Sugiyama (Rits) OFT2006-17 |
We have successively fabricated a blazed nano grating based on the X-ray gray-scale lithography technology.
The structu... [more] |
OFT2006-17 pp.7-9 |
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