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 Conference Papers (Available on Advance Programs)  (Sort by: Date Descending)
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Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM 2014-02-28
13:50
Tokyo Kikai-Shinko-Kaikan Bldg. [Invited Talk] Novel Implantation Process of Carbon Nanotubes for Plugs and Vias, and their Integration with Transferred Multilayer Graphene Wire Obtained by Annealing Sputtered Amorphous Carbon
Motonobu Sato, Makoto Takahashi, Mizuhisa Nihei, Shintaro Sato, Naoki Yokoyama (AIST) SDM2013-170
We have developed a novel process, the implantation of carbon nanotubes (CNTs) into holes like plugs, vias, and through-... [more] SDM2013-170
pp.29-33
SDM 2013-02-04
10:05
Tokyo Kikai-Shinko-Kaikan Bldg. Improved Thermal Conductivity by Vertical Graphene Contact Formation for Thermal TSV
Akio Kawabata, Mizuhisa Nihei, Tomo Murakam, Motonobu Sato, Naoki Yokoyama (AIST) SDM2012-150
This paper reports the tailoring thermal conductivity of novel dense vertical and horizontal graphene (DVHG) structures,... [more] SDM2012-150
pp.1-4
SDM 2012-03-05
13:00
Tokyo Kikai-Shinko-Kaikan Bldg. Initial Growth Observation of Multilayer Graphene on SiO2/Si substrate using Raman Spectroscopy and XPS
Yoshihiro Ojiro, Shuichi Ogawa (Tohoku Univ.), Manabu Inukai (JASRI), Motonobu Sato (AIST), Eiji Ikenaga, Takayuki Muro (JASRI), Mizuhisa Nihei (AIST), Yuji Takakuwa (Tohoku Univ.), Naoki Yokoyama (AIST) SDM2011-179
The photoemission-assisted Plasma enhanced CVD is the one of the most possible method to grow graphene in the low temper... [more] SDM2011-179
pp.19-24
SDM 2011-02-07
13:10
Tokyo Kikai-Shinko-Kaikan Bldg. Networked nanographite growth using photoemission-assisted enhanced plasma CVD: discharge condition dependence of the crystallographic quality
Shuichi Ogawa (Tohoku Univ./JST), Motonobu Sato (Fujitsu/JST), Haruki Sumi (Tohoku Univ.), Mizuhisa Nihei (Fujitsu/JST), Yuji Takakuwa (Tohoku Univ./JST) SDM2010-220
he photoemission-assisted plasma chemical vapor deposition has been developed to form the graphene for large area withou... [more] SDM2010-220
pp.25-30
SDM 2011-02-07
14:10
Tokyo Kikai-Shinko-Kaikan Bldg. Networked-Nanographite Wire Grown by Metal-Photoemission-assisted Plasma-enhanced CVD without Catalysts
Motonobu Sato (Fujitsu Ltd./JST/AIST), Shuichi Ogawa (Tohoku Univ./JST), Eiji Ikenaga (JASRI/JST), Yuji Takakuwa (Tohoku Univ./JST), Mizuhisa Nihei (Fujitsu Ltd./JST/AIST), Naoki Yokoyama (AIST) SDM2010-222
Carbon-based materials, such as carbon nanotubes and graphene nanoribbons, have been studied as interconnect materials b... [more] SDM2010-222
pp.37-42
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