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Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM 2021-02-05
13:45		 Online Online Characteristic properties of Co-Zr alloy as a single-layer barrier
Yuki Yamada, Masataka Yahagi, Junichi Koike (Tohoku Univ.) SDM2020-56		 The purpose of this work is to replace the thick double layer of Ta liner and TaN barrier with a single layer of Co allo... [more] SDM2020-56
pp.7-10
SDM 2021-02-05
14:05		 Online Online Limitation of barrier property of ultra-thin TaN film
Toshihiro Kuge, Masataka Yahagi, Junichi Koike (Tohoku Univ.) SDM2020-57		  [more] SDM2020-57
pp.11-14
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