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SCE 2014-01-24
15:55		 Tokyo Kikaishinkou-kaikan Bldg. Trilayer junction technology for superconducting quantum integrated circuit
Masaaki Maezawa, Tetsuro Satoh, Yoshiji Noguchi, Masashi Yamagishi, Mutsuo Hidaka, Tsuyoshi Horikawa (AIST) SCE2013-57		 We present a fabrication technology of deep-submicron Josephson junctions for scalable integration of superconducting qu... [more] SCE2013-57
pp.129-134
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