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Paper #
ED
,
CPM
,
LQE
2006-10-06
14:05
Kyoto
GaN films deposited by CS-MBD with pulsed source feeding
Masatoshi Arai
,
Koichi Sugimoto
,
Shinichi Egawa
,
Taichi Baba
,
Masaru Sawada
,
Tohru Honda
(
Kogakuin Univ.
)
GaN films were deposited at low temperature by compound-source molecular beam deposition (CS-MBD) with pulsed-source fee...
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ED2006-169
CPM2006-106
LQE2006-73
pp.93-96
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