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 Conference Papers (Available on Advance Programs)  (Sort by: Date Descending)
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Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM 2019-10-23
14:20		 Miyagi Niche, Tohoku Univ. A study on ferroelectric non-doped HfO2 directly deposited on Si(100) substrate by introducing Hf interlayer
Masakazu Kataoka, Masaki Hayashi, Min Gee Kim, Shun-ichiro Ohmi (Tokyo Tech) SDM2019-54		 In this study, we investigated suppression of SiO2 interfacial layer formation by introducing Hf interlayer to realize t... [more] SDM2019-54
pp.7-10
SDM 2019-10-23
15:40		 Miyagi Niche, Tohoku Univ. Investigation of ferroelectric undoped HfO2 formation on Si(100) utilizing post metallization annealing for nonvolatile memory application
Min Gee Kim, Masakazu Kataoka, Masaki Hayashi, Rengie Mark D. Mailig, Shun-ichiro Ohmi (Tokyo Tech.) SDM2019-56		 In this study, post metallization annealing (PMA) for the ferroelectric undoped HfO2 deposited on Si(100) was investigat... [more] SDM2019-56
pp.17-20
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