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Abstract
Paper #
ED
,
CPM
,
SDM
2006-05-18
13:50
Aichi
VBL, Toyohashi University of Technology
Influence of Annealing Conditions on the Sensing Properties of Oxygen Gas Sensor with β-Ga2O3 Films Deposited by CSD Method for High Temperatures
Marilena Bartic
(
Shizuoka Univ.
),
Cristian-Ioan Baban
(
Al. I. Cuza Univ.
),
Masaaki Isai
,
Masami Ogita
(
Shizuoka Univ.
)
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ED2006-22
CPM2006-9
SDM2006-22
pp.11-14
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