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Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM 2019-10-24
16:10
Miyagi Niche, Tohoku Univ. Observation of Fluctuation of Magnetron Sputtering Plasmas Using High-speed Video Camera
Shintaro Yamazaki, Tetsuya Goto, Manabu Suzuki, Rihito Kuroda, Shigetoshi Sugawa (Tohoku Univ.) SDM2019-67
 [more] SDM2019-67
pp.69-72
EMD 2009-12-18
14:30
Chiba   Tribological Characteristics of ECR-Sputtered Fluorocarbon Thin Films
Manabu Suzuki, Tomoyuki Kamata, Yusuke Tomine, Shun Hiruma, Shigeru Umemura (Chiba Inst. of Tech.), Shigeru Hirono (MES AFTY), Hidekazu Tohara, Hujio Okino, Yoshiyuki Hattori (Shinshu Univ.), Osamu Niwa (AIST), Diao Dongfeng (Xi'an Jiaotong Univ.) EMD2009-109
Fluorine-containing carbon thin films with low resistivity and high wear durability were synthesized by electron-cyclotr... [more] EMD2009-109
pp.17-20
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