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Committee
Date Time
Place
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Abstract
Paper #
SDM
,
ED
(Workshop)
2012-06-28
10:00
Okinawa
Okinawa Seinen-kaikan
Effects of Light and Air Exposures on Electrical Properties of GeO2/Ge and Al2O3/Ge Gate Stack Structures
Kusumandari
,
Wakana Takeuchi
,
Kimihiko Kato
,
Shigehisa Shibayama
,
Mitsuo Sakashita
,
Noriyuki Taoka
,
Osamu Nakatsuka
,
Shigeaki Zaima
(
Nagoya Univ.
)
Low temperature processes such as plasma process are required for realizing Ge metal-oxide-semiconductor field effect tr...
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