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Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM 2020-10-22
10:50
Online Online High capacitance density high breakdown voltage textured deep trench SiN capacitors toward 3D integration
Koga Saito, Ayano Yoshida, Rihito Kuroda (Tohoku Univ.), Hiroshi Shibata, Taku Shibaguchi, Naoya kuriyama (LAPIS Semiconductor Miyagi), Shigetoshi Sugawa (Tohoku Univ.) SDM2020-15
High capacitance density and High breakdown voltage textured deep trench SiN capacitors are presented. The developed cap... [more] SDM2020-15
pp.7-11
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