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Conference Papers (Available on Advance Programs) (Sort by: Date Descending)

Committee	Date Time	Place		Paper Title / Authors	Abstract	Paper #
ED	2013-08-09 09:00	Toyama	University of Toyama	MEMS Microphones on InP Substrates for High Performance Digital Ultrasonic Sensors Shunya Fujino, Yuta Mizuno, Kazuhiro Takaoka, Masayuki Mori, Koichi Maezawa (Univ. of Toyama) ED2013-44	This paper describes the fabrication process of the MEMS microphones on InP substrates. The process is based on ozone as... [more]	ED2013-44 pp.33-36
ED	2010-09-13 14:55	Fukuoka	Kyushu Institute of Technology(Wakamatsu)	Possibility of digital microphone sensors using frequency modulation delta-sigma ADC Koichi Maezawa, Shingo Shibata, Kazuhiro Takaoka, Masayuki Mori (Univ. Toyama) ED2010-126	A Delta Sigma Analog/Digital converter using frequency modulation (FM) intermediate signal is a promising device for sen... [more]	ED2010-126 pp.19-23

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