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Paper #
ICD
,
SDM
2005-08-18
13:50
Hokkaido
HAKODATE KOKUSAI HOTEL
A Test Structure to Analyze (Highly-Doped)/(Lightly-Doped)-Drain in LDD-type CMOSFET
Takashi Ohzone
(
Okayama Pref. Univ.
),
Toshihiro Matsuda
(
Toyama Pref. Univ.
),
Kazuhiko Okada
,
Takayuki Morishita
,
Kiyotaka Komoku
(
Okayama Pref. Univ.
),
Hideyuki Iwata
(
Toyama Pref. Univ.
)
A test structure to separately measure sheet resistances of highly-doped-drain (HDD) and lightly- doped-drain (LDD) in L...
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SDM2005-137
ICD2005-76
pp.55-60
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