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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
SIP, ICD, IE, IPSJ-SLDM |
2005-10-21 15:50 |
Miyagi |
Ichinobo, Sakunami-Spa |
A cell library development methodology for character projection Makoto Sugihara (ISIT), Taiga Takata, Kenta Nakamura (Kyushu Univ.), Ryoichi Inanami (e-BEAM), Hiroaki Hayashi (Tokyo Electron), Katsumi Kishimoto (e-BEAM), Tetsuya Hasebe (Tokyo Electron), Yukihiro Kawano (e-BEAM), Yusuke Matsunaga, Kazuaki Murakami (Kyushu Univ.), Katsuya Okumura (Univ. of Tokyo) |
We propose a cell library development methodology for throughput enhancement of electron beam direct-write (EBDW) system... [more] |
SIP2005-128 ICD2005-147 IE2005-92 pp.79-84 |
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