|
|
All Technical Committee Conferences (Searched in: All Years)
|
|
Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
|
Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
US |
2009-09-29 15:45 |
Hokkaido |
Noboribetsu Grand Hotel |
Sound Pressure Analysis of the Ultrasonic Cleaning Machine Using Waveguide mode Yoshikazu Koike (Shibaura Inst. of Tech.), Kazunari Suzuki (Shibaura Inst. of Tech./Kaijo corp.), Kenta Suzuki, Ryuta Machida (Shibaura Inst. of Tech.), Ki Han, Shoi-ichi Okano, Junichiro Soejima (Shibaura Inst. of Tech./Kaijo corp.) US2009-44 |
Authors proposed ultrasonic cleaning machine using the ultrasonic waveguide mode in order to reduce damage of the LSI pa... [more] |
US2009-44 pp.37-40 |
ED |
2009-06-11 13:50 |
Tokyo |
|
Post CMP Cleaning by Megasonic Using Waveguide Tube Type Equipment Kazunari Suzuki (Kaijo Corp./Shibaura Inst. of Tech.), Ki Han, Shouichi Okano, Junichiro Soejima (Kaijo Corp.), Yoshikazu Koike (Shibaura Inst. of Tech.) ED2009-37 |
At single wafer processing, we proposed novel ultrasonic cleaning equipment using the waveguide tube made of quartz. At ... [more] |
ED2009-37 pp.7-10 |
US |
2009-04-24 15:45 |
Tokyo |
The University of Electro-Communications |
A Novel Ultrasonic Cleaning Equipment using Waveguide mode Kazunari Suzuki (Shibaura Inst. of Tech./Kaijo Corp.), Yoshikazu Koike (Shibaura Inst. of Tech.), Ki Han, Shouichi Okano, Junichiro Soejima (Kaijo Corp.) US2009-5 |
At single wafer processing, spin cleaner using spouting ultrasonic cleaning transducer has been developed. In
such a pr... [more] |
US2009-5 pp.23-28 |
|
|
|
Copyright and reproduction :
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
|
[Return to Top Page]
[Return to IEICE Web Page]
|