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 Conference Papers (Available on Advance Programs)  (Sort by: Date Descending)
 Results 1 - 8 of 8  /   
Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM 2021-02-05
Online Online Characteristic properties of Co-Zr alloy as a single-layer barrier
Yuki Yamada, Masataka Yahagi, Junichi Koike (Tohoku Univ.) SDM2020-56
The purpose of this work is to replace the thick double layer of Ta liner and TaN barrier with a single layer of Co allo... [more] SDM2020-56
SDM 2021-02-05
Online Online Limitation of barrier property of ultra-thin TaN film
Toshihiro Kuge, Masataka Yahagi, Junichi Koike (Tohoku Univ.) SDM2020-57
 [more] SDM2020-57
SDM 2020-02-07
Tokyo Tokyo University-Hongo [Special Invited Talk] Possibility of intermetallic compounds for ultra-small scale interconnections
Junichi Koike, Linghan Chen (Tohoku Univ), Shinji Yokogawa (Univ. Elec-Comm) SDM2019-93
 [more] SDM2019-93
SDM 2019-10-24
Miyagi Niche, Tohoku Univ. [Invited Talk] NiAl as Cu alternative for ultrasmall feature sizes
Linghan Chen, Junichi Koike, Daisuke Ando, Yuji Sutou (Tohoku Univ.) SDM2019-59
Conventional Cu interconnect will suffer from a great line resistivity increase due to aggressive downscaling of the dim... [more] SDM2019-59
SDM 2019-10-24
Miyagi Niche, Tohoku Univ. [Invited Lecture] Effect of an oxide layer at Co/Si interface on Schottky barrier height and contact resistivity
Koichi Kido, Ken Sato, Rihito Kuroda, Daisuke Ando, Yuji Suto, Junichi Koike (Tohoku Univ.) SDM2019-60
 [more] SDM2019-60
SDM 2018-10-17
Miyagi Niche, Tohoku Univ. [Invited Talk] Cr2Ge2Te6-Based PCRAM Showing Low Resistance Amorphous and High Resistance Crystalline States
Shogo Hatayama, Yuji Sutou, Daisuke Ando, Junichi Koike (Tohoku Univ.) SDM2018-56
Phase change random access memory (PCRAM) has attracted much attention as one of next generation non-volatile memory. Ge... [more] SDM2018-56
SDM 2018-02-08
Tokyo Tokyo Univ. [Invited Talk] Characteristics of Cobalt alloy for low resistivity contact in sub 10 nm FinFET
Junichi Koike, Maryamsadat Hosseini, Daisuke Ando, Yuji Sutou (Tohoku Univ.)
SDM 2017-02-06
Tokyo Tokyo Univ. [Invited Talk] Properties of amorphous Co alloys having liner/barrier function in advanced LSI interconnection
Maryamsadat Hosseini, Hiroyuki Koide, Kazuki Watanabe, Daisuke Ando, Yuji Sutou, Junichi Koike (Tohoku Univ.)
 Results 1 - 8 of 8  /   
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