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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
SDM |
2010-10-21 15:30 |
Miyagi |
Tohoku University |
Mechanism of Work Function Modulation of PtSi Alloying with Yb Jumpei Ishikawa, Jun Gao, Shun-ichiro Ohmi (Tokyo Tech) SDM2010-154 |
The work function modulation of PtSi by alloying with Yb to achieve ultra low contact resistance for advanced CMOS was i... [more] |
SDM2010-154 pp.13-16 |
SDM |
2010-10-21 16:10 |
Miyagi |
Tohoku University |
A Study on Precise Control of PtSi Work Function by Alloying with Hf Jun Gao, Jumpei Ishikawa, Shun-ichiro Ohmi (Tokyo Tech) SDM2010-155 |
[more] |
SDM2010-155 pp.17-20 |
ED, SDM |
2010-07-02 11:45 |
Tokyo |
Tokyo Inst. of Tech. Ookayama Campus |
Modulation of PtSi work function by alloying with low work function metal Jun Gao, Jumpei Ishikawa, Shun-ichiro Ohmi (Tokyo Inst. of Tech.) ED2010-91 SDM2010-92 |
[more] |
ED2010-91 SDM2010-92 pp.173-176 |
SDM |
2009-10-29 14:30 |
Miyagi |
Tohoku University |
A study on Improvement of Thermal Stability for PtSi Alloying with Hf Utilizing Two-Step Silicidation Process Jun Gao, Jumpei Ishikawa, Shun-ichiro Ohmi (Tokyo Inst. of Tech.) SDM2009-118 |
To improve the thermal stability of PtxHfySi formed at 400℃/60 min, 2-step silicidation process was investigated. By usi... [more] |
SDM2009-118 pp.7-10 |
SDM |
2008-10-10 13:30 |
Miyagi |
Tohoku Univ. |
A study on work function modulation in PtSi alloying with Hf Jun Gao, Jumpei Ishikawa, Shun-ichiro Ohmi (Tokyo Tech) SDM2008-162 |
Mechanisms of work function modulation in PtSi alloying with Hf was investigated. When a silicidation of Pt(15 nm)/Hf(8 ... [more] |
SDM2008-162 pp.41-44 |
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