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Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM 2022-02-04
09:45		 Online Online [Invited Talk] Advanced Damascene Integration with Self Assembled Monolayer (SAM)
Hiroyuki Nagai, Mitsuaki Iwashita, Yuki Kikuchi (TEL), Kawasaki Hiroaki, Gyana Pattanaik (TTCA), Keiichi Fujita (TKL), Kazutoshi Iwai (TEA), Hiroyuki Komatsu, Yuuki Ozaki (JSR) SDM2021-75		 Selective deposition of Cu diffusion barrier metal layer on dielectric with Self-Assembled Monolayer (SAM) has been demo... [more] SDM2021-75
pp.5-8
MI 2007-01-27
15:15		 Overseas the Cheju National Univ. Advance in imaging-technology for cardiac area analysis
Hiroyuki Nagai, Yasuhiro Kawano, Yasuaki Goko, Syogo Azemoto (AZE) 		In these days, with technical advantages for diagnostic imaging systems, such as MDCT (MSCT) and MRI, in Cardiac area, t... [more] MI2006-197
pp.147-149
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